Metal‐Organic Chemical Vapor Deposition of Oxide Perovskite Films: A Facile Route to Complex Functional Systems

Perovskite oxide type materials exhibit a great profusion of unique functional properties and for this reason they have been named inorganic chameleon. Nevertheless, their actual applications require the availability these systems in thin-film form synthesized through simple, scalable, straightforward technique. Metal-organic chemical vapor deposition (MOCVD) has shown to be an outstanding process prepare thin films multi-component oxides. Herein, focus is devoted perovskite on both single crystal non-single substrates MOCVD processes. This study discusses principles basic rules governing conventional, plasma-enhanced, liquid-assisted Among plethora perovskites, several classes functionalities belonging class: from superconductors dielectrics giant-k dielectrics, colossal magnetoresistance ionic conductors, piezoelectrics ferroelectrics, are explored detail.